JPH0216938U - - Google Patents
Info
- Publication number
- JPH0216938U JPH0216938U JP9464188U JP9464188U JPH0216938U JP H0216938 U JPH0216938 U JP H0216938U JP 9464188 U JP9464188 U JP 9464188U JP 9464188 U JP9464188 U JP 9464188U JP H0216938 U JPH0216938 U JP H0216938U
- Authority
- JP
- Japan
- Prior art keywords
- filter layer
- hepa filter
- clean room
- speaker
- room
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010586 diagram Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
Landscapes
- Ventilation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9464188U JPH05748Y2 (en]) | 1988-07-19 | 1988-07-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9464188U JPH05748Y2 (en]) | 1988-07-19 | 1988-07-19 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0216938U true JPH0216938U (en]) | 1990-02-02 |
| JPH05748Y2 JPH05748Y2 (en]) | 1993-01-11 |
Family
ID=31319202
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9464188U Expired - Lifetime JPH05748Y2 (en]) | 1988-07-19 | 1988-07-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH05748Y2 (en]) |
-
1988
- 1988-07-19 JP JP9464188U patent/JPH05748Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH05748Y2 (en]) | 1993-01-11 |